Piezoresistive cantilever designed for torque magnetometry
نویسندگان
چکیده
New piezoresistive silicon cantilevers designed specifically for torque magnetometry on microscopic samples have been microfabricated and tested. These levers have been optimized to detect the torque in two directions corresponding to flexion and torsion. Torque resolution of ;10 N m can be achieved depending on the operating mode. In one version an integrated loop allows an absolute calibration of the device with an accuracy of ;1%. This loop can also be used to excite the lever mechanically. One application is the determination of the mass of nanogram samples by measuring the resonance frequency shift ~nanobalance!. © 1998 American Institute of Physics. @S0021-8979~98!09203-2#
منابع مشابه
Nanotesla Torque Magnetometry Using a Microcantilever
We present a novel ultrasensitive magnetometry technique using a micromachined magnetic cantilever that is brought in resonance. The induced magnetic moment generates a torque on the cantilever, thereby effectively stiffening the cantilever spring constant and changing its resonance frequency. Experiments are in good correspondence with the presented analytical model for this frequency shift, p...
متن کاملOn the design of piezoresistive silicon cantilevers with stress concentration regions for scanning probe microscopy applications
In this paper, the design of silicon based cantilevers for scanning probe microscopy has been described in detail. ANSYS software has been used as a tool to design and model the mechanical properties of the silicon based cantilevers. The incorporation of stress concentration regions (SCRs) with a thickness smaller than the cantilever thickness, to localize stresses, has been explored in detail ...
متن کاملDesign of Piezoresistive Silicon Cantilevers with Stress Concentration Region (SCR) for Scanning Probe Microscopy (SPM) Applications
This paper describes and evaluates the incorporation of novel Stress Concentration Region (SCR) in silicon based cantilevers to enhance piezoresistive displacement, force, and torque sensitivities. In brief, SCR is a region, on the cantilever, with a thickness smaller than the cantilever thickness and of an appropriate length to localize stress where piezoresistors are implanted. It was found t...
متن کاملPiezoresistive cantilever array for life sciences applications
Atomic Force Microscopy (AFM) techniques are used with oneor two-dimensional arrays of piezoresistive probes for parallel imaging. We present a newly designed AFM platform to drive these passivated piezoresistive cantilever arrays in air and liquid environments. Large area imaging in liquid as well as qualitative and quantitative analysis of biological cells are demonstrated by the means of pie...
متن کاملMolecular Order in Buried Layers of TbPc2 Single-Molecule Magnets Detected by Torque Magnetometry.
Cantilever torque magnetometry is used to elucidate the orientation of magnetic molecules in thin films. The technique allows depth-resolved investigations by intercalating a layer of anisotropic magnetic molecules in a film of its isotropic analogues. The proof-of-concept is here demonstrated with the single-molecule magnet TbPc2 evidencing also an exceptional long-range templating effect on s...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 1998